furnace annealの例文

• Furnace anneals are performed by equipment especially built to heat semiconductor wafers.
• Increasingly, furnace anneals are being supplanted by Rapid Thermal Processing ( RTP ).
• Unlike furnace anneals they are short in duration, processing each wafer in several minutes.
• RTP or RTA fixes this by having thermal cycles for each wafer that is of the order of minutes rather than hours for furnace anneals.